Durable photoresist bake heater
On the fab floor, you don’t judge a photoresist bake by degrees alone. You judge it by uptime, by particle counts that don’t creep, and by CD...
Photoresist pre bake infrared heater
On the fab floor, you know the stakes. A 1°C swing during photoresist soft bake can scrap a 300mm wafer before you even get to exposure. Conventional...