http://ir-heat-work.com/zh/tags/%E8%8E%B1%E5%AE%9D/ Recent content in 莱宝 on Professional IR Heat Solutions Hugo zh Sat, 06 Jun 2026 04:20:24 +0800 http://ir-heat-work.com/zh/posts/leybold-vacuum-heater-spare/ Sat, 06 Jun 2026 04:20:24 +0800 http://ir-heat-work.com/zh/posts/leybold-vacuum-heater-spare/ <p><img src="http://ir-heat-work.com/images/0ea7296bcdd661f341d1983d454c4037.png" alt="Leybold 真空加热器备件"></p> <p>在晶圆厂车间，软烘或硬烘过程中的热偏差不仅仅是影响良率，而是直接破坏良率。当Leybold真空加热器开始出现漂移时，光刻胶的剖面会坍塌，关键尺寸（CD）均匀性变差，且蚀刻偏移增大。我们设计制造了这些Leybold真空加热器备件，以确保热预算的准确，循环稳定可控。</p>