Заміна лампи Mattson RTP

Thu, 04 Jun 2026 03:53:07 +0800

When a lamp goes down on your Mattson RTP tool, it’s more than downtime. You lose thermal budget, the bake profile on the photoresist drifts, and you’re suddenly staring down a particle excursion that can scrap the lot. You don’t need a workaround that forces you to requalify the process. You need a replacement that behaves exactly like the original.
What we focused on, technically
We built the Mattson RTP lamp replacement as a straight-spec drop-in: short-wave halogen elements, quartz envelopes, and filament geometry engineered for repeatable temperature control. The goal is wafer-level thermal uniformity within ±0.1°C and stable output across the soft bake and hard bake windows where photoresist chemistry is unforgiving. It runs in Class 1–100 cleanrooms, and zero particle generation isn’t a nice-to-have—it’s the baseline. Field data shows sustained performance beyond 5,000 hours with minimal degradation, so you get long campaigns without drift.
Why this matters on the line
In production, it translates to fewer recipe tweaks after a lamp swap, stable critical dimension control, and yield behavior you can count on lot after lot. Power draw is tuned, and the thermal response keeps your lithography and downstream thermal steps within tighter windows. You keep the same process intent, the same control logic, and the same footprint—only the consumable changes.
A few practical notes
Installation is straightforward on compatible Mattson RTP platforms, but double-check chamber geometry, lamp socket type, and connector alignment before you order. Operating life will depend on power settings, coolant flow, and how clean the chamber stays, so keep your PM cadence tight and monitor output drift through your SPC routine.

Матсон on Professional IR Heat Solutions

Заміна лампи Mattson RTP